MEMS microphone module

ABSTRACT

A MEMS microphone module includes a MEMS microphone, a modulator connected downstream of the MEMS microphone, and an interference compensation circuit to apply an interference compensation signal to an input of the modulator, the interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

This application claims the benefit of German Application No. 102018204687.5, filed on Mar. 27, 2018, which application is hereby incorporated herein by reference.

TECHNICAL FIELD

Exemplary embodiments relate to a MEMS (micro-electro-mechanical systems) microphone module. Further exemplary embodiments relate to a method for operating a MEMS microphone module. Some exemplary embodiments relate to a microphone application with low-frequency interference suppression.

BACKGROUND

In digital MEMS microphone modules, a pressure pulse brought about for example by wind or slamming of windows or doors can cause an overload or overdriving of the modulator of the MEMS microphone. Such an overload or overdriving of the modulator can lead to a rise in the modulator noise, which can be manifested as long “audible” subsequent noise in the digital output signal of the MEMS microphone module.

SUMMARY

Exemplary embodiments provide a MEMS microphone module, comprising a MEMS microphone, a modulator connected downstream of the MEMS microphone, and an interference compensation circuit configured to apply an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the present invention will be described in greater detail with reference to the accompanying figures, in which:

FIG. 1 shows a schematic block diagram of a digital MEMS microphone module;

FIG. 2 shows a schematic block diagram of a MEMS microphone module, in accordance with one exemplary embodiment;

FIG. 3 shows a schematic block diagram of a MEMS microphone module comprising a digital modulator, in accordance with one exemplary embodiment;

FIG. 4 shows a schematic block diagram of a MEMS microphone module comprising a digital modulator, in accordance with a further exemplary embodiment;

FIG. 5 shows a schematic block diagram of a MEMS microphone module comprising an analog-to-digital converter as modulator, in accordance with one exemplary embodiment;

FIG. 6 shows a schematic block diagram of an exemplary MEMS microphone module comprising a digital modulator, in accordance with one exemplary embodiment;

FIG. 7 shows a diagram of a profile of the output signal of the digital modulator with activated and deactivated compensation of low-frequency signal interferences, plotted against frequency; and

FIG. 8 shows a flow diagram of a method for operating a MEMS microphone module, in accordance with one exemplary embodiment.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

In the following description of the exemplary embodiments of the present invention, in the figures identical or identically acting elements are provided with the same reference sign, and so the description thereof is mutually interchangeable.

As has already been mentioned above in the context of the introductory part of the description, a pressure pulse can bring about an overload or overdriving of the modulator of the MEMS microphone, which can lead to a rise in the modulator noise and can be manifested as long “audible” subsequent noise in the digital output signal of the MEMS microphone module.

This effect will firstly be explained in detail with reference to FIG. 1 before exemplary embodiments of the present invention are described afterward with reference to FIGS. 2 to 7.

FIG. 1 shows a schematic block diagram of a digital MEMS microphone module 100. The digital MEMS microphone module 100 can comprise a MEMS microphone 102, an amplifier unit 104 (e.g. a source follower), an analog-to-digital converter (ADC) 106, a digital filter 108 and a digital modulator 110.

The behavior of the MEMS microphone module 100 in the case of an overload or overdriving (overload behavior) is dominated by the digital modulator 110, which can be a 1-bit modulator (in the case of an implementation as multi-bit architecture, the ADC 106 is generally less critical than the modulator). A corresponding concern comprises a great rise in the modulator noise. There are applications in which the overload behavior of the MEMS microphone module is essential. By way of example, the MEMS microphone in a headset can be subjected to a pressure pulse by means of a touch. Said pulse should merely generate an expected “plop” interference sound and no “hissing” sounds, on account of a rise in the modulator noise. The overload behavior of the MEMS microphone module can be determined by a special test, the so-called “syringe test”, in which a syringe into which a MEMS microphone is admitted is used to apply pressure pulses to the MEMS microphone by compression/decompression of the air volume situated in the syringe.

One possibility for improving the overload behavior of the MEMS microphone module 100 comprises decreasing the sensitivity (of the MEMS microphone module 100) by means of a digital damping (e.g. by means of a digital damping block 109 in FIG. 1, referred to as digital gain), in order to take the digital modulator 110 out of the critical path. The typical decrease required lies in the range of 2 to 4 dB. However, this results in an undesired reduction of the SNR (SNR=signal-to-noise ratio).

A further possibility for improving the overload behavior of the MEMS microphone module 100 comprises reducing the low-frequency energy by means of a digital high-pass filter. However, the implementation entails considerable expenditure. Firstly, the coefficient word width becomes very large since the corner frequency of the high-pass filter has to be chosen to be very low (the coefficient word width is generally dependent on the ratio of corner frequency to sampling rate), which means corresponding outlay in respect of area. Secondly, the power loss is also high since the digital high-pass filter operates at a high sampling rate.

Exemplary embodiments that avoid the disadvantageous SNR reduction and the high implementation outlay are described below.

FIG. 2 shows a schematic block diagram of a MEMS microphone module 100 in accordance with one exemplary embodiment. The MEMS microphone module 100 comprises a MEMS microphone 102, a modulator 110 (e.g. a 1-bit (single bit) modulator, i.e. a modulator that provides only one bit at the output per clock cycle) connected downstream of the MEMS microphone 102, and an interference compensation circuit 112 configured to apply an interference compensation signal 114 to an input of the modulator 110, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator 110 or a block 111 connected upstream of the input of the modulator 110.

In exemplary embodiments, the low-frequency interference signal can have a frequency of less than 10 Hz (or less than 7 Hz, or less than 5 Hz, or less than 3 Hz).

In exemplary embodiments, the low-frequency signal interference can be brought about by a pressure pulse acting on a membrane of the MEMS microphone 102.

In exemplary embodiments, the low-frequency interference signal can have an amplitude that is greater than a permissible or allowed input amplitude range of the modulator 110, such that the low-frequency interference signal would bring about an overdriving or overload of the modulator 110 with the interference compensation circuit 112 deactivated (i.e. if no interference compensation signal 114 is present at the input of the modulator 110).

By way of example, a pressure pulse can bring about a low-frequency signal interference in the signal chain of the MEMS microphone module 100 which is manifested acoustically as a “plop” interference sound. In order to counteract a rise in the modulator noise when such a low-frequency signal interference occurs, in exemplary embodiments, an interference compensation signal 114 is applied to the input of the modulator 110, said interference compensation signal being opposed to the low-frequency signal interference.

By way of example, the interference compensation signal 114 can have an inverted version (e.g. a sign-inverted version) of the low-frequency signal interference or a further processed version thereof (e.g. a filtered or amplified version of the low-frequency signal interference), such that the interference compensation signal 114 counteracts the low-frequency signal interference present at the input of the modulator 110 or a block 111 connected upstream of the modulator 110, e.g. reduces or even cancels the low-frequency signal interference.

As can be discerned in FIG. 2, in exemplary embodiments, the interference compensation circuit 112 can be directly connected to the input of the modulator 110 or be connected to the input of the modulator 110 via a block 111 connected upstream of the input of the modulator 110. The block 111 connected upstream of the input of the modulator 110 can be any block of the signal chain between MEMS microphone 102 and modulator 110, such as, for example, an equalizer, filter or amplifier connected upstream of the modulator 110.

In exemplary embodiments, the interference compensation circuit 112 can be configured to derive the low-frequency signal interference (e.g. by filtering or estimation) from an input signal 113 of the interference compensation circuit 112. The input signal 113 of the interference compensation circuit 112 can be a microphone signal provided by the MEMS microphone 102 or a further processed version (e.g. a digital version) of the microphone signal, which is provided e.g. by an analog-to-digital converter, filter or other block connected downstream of the MEMS microphone.

By way of example the interference compensation circuit 112 can tap off a microphone signal provided by the MEMS microphone 102 or a further processed version (e.g. a digital version) of the microphone signal, e.g. somewhere in the signal chain of the MEMS microphone module 100 (e.g. at the output of the MEMS microphone, of an analog-to-digital converter, filter or other block connected downstream of the MEMS microphone), in order to obtain the input signal 113 and to derive therefrom the low-frequency signal interference (e.g. by filtering or estimation).

FIG. 3 shows a schematic block diagram of a MEMS microphone module 100 comprising a digital modulator 110 in accordance with one exemplary embodiment. In other words, FIG. 3 shows a digital microphone with compensation of low-frequency interference in accordance with a first exemplary variant.

The MEMS microphone module 100 comprises a MEMS microphone 102 (see FIG. 1), an amplifier unit 104 (see FIG. 1), an analog-to-digital converter (ADC) 106, a digital filter 108, an equalizer 116, the digital modulator 110 and an optional interface block (IF).

As is shown in accordance with one exemplary embodiment in FIG. 3, the interference compensation circuit 112 can be configured to tap off the digital version of the microphone signal at the output of the digital filter 108, to derive therefrom the low-frequency signal interference (e.g. by estimation or filtering, for example by means of low-pass filter or bandpass filter), and to provide the interference compensation signal 114 with an inverted version (e.g. sign-inverted version) of the low-frequency signal interference or a further processed version thereof (e.g. an amplified or further filtered version of the low-frequency signal interference), such that the interference compensation signal 114 is opposed to the low-frequency signal interference present at the input of the modulator 110 or at the input of the equalizer 116.

In accordance with the exemplary embodiment shown in FIG. 3, the interference compensation circuit 112 can be connected to the input of the modulator 110 or to the input of the equalizer 116 in order to apply the compensation signal 114 to the input of the modulator 110.

FIG. 4 shows a schematic block diagram of a MEMS microphone module 100 comprising a digital modulator 110 in accordance with a further exemplary embodiment. In other words, FIG. 4 shows a digital microphone with compensation of low-frequency interference in accordance with a second exemplary variant.

Compared with the exemplary embodiment of the MEMS microphone module 100 as shown in FIG. 3, the interference compensation circuit 112 in the case of the exemplary embodiment of the MEMS microphone module 100 as shown in FIG. 4 can be configured to tap off the digital version of the microphone signal at the output of the analog-to-digital converter 106.

As is shown in FIGS. 3 and 4, in exemplary embodiments on the basis of the digital signal of the analog-to-digital converter (ADC) 106 (see FIG. 4) or some other signal from the filter chain (see e.g. FIG. 3) the low-frequency interference can be estimated/filtered and subsequently subtracted upstream of the digital modulator 110. In the exemplary embodiment shown in FIG. 3, the digital modulator 110 can operate at a lower sampling rate (reduced power loss and area). The compensation can, if appropriate, also be controlled by a control signal 120 (externally or internally generated).

The exemplary embodiments shown in FIGS. 2 to 4 have the advantage that the low-frequency interference can be reduced or even minimized, and the overload behavior can be improved as a result.

Furthermore, the exemplary embodiments shown in FIGS. 2 to 4 have the advantage that (dominant) offsets (e.g. at the input of the modulator 110) can be reduced or even minimized. This is advantageous for stereo applications.

Furthermore, the exemplary embodiments shown in FIGS. 2 to 4 have the advantage that these arrangements can also be used as defined digital LFRO (LFRO=low frequency roll off, denoting the frequency response of the high-pass filter) (without variations!) if the MEMS LFRO is chosen to be sufficiently low (yields increased SNR).

Furthermore, the exemplary embodiments shown in FIGS. 2 to 4 have the advantage that the compensation can also be carried out in an event-dependent manner or dynamically.

The above-described concept for suppressing low-frequency interference signal components can also be applied to low cost microphones that do not require a complex digital part but rather use a 1-bit (single bit) analog-to-digital converter (ADC) as modulator 110, as is explained below with reference to FIG. 5.

FIG. 5 shows a schematic block diagram of a MEMS microphone module 100 comprising an analog-to-digital converter as modulator, in accordance with one exemplary embodiment. In other words, FIG. 5 shows a schematic block diagram of a low cost microphone with low-frequency interference suppression.

The MEMS microphone module 100 shown in FIG. 5 comprises a MEMS microphone 102 (see FIG. 1), the analog-to-digital converter as modulator 110, the interference signal compensation circuit 112 and an optional interface block (IF) 118.

As can be discerned in accordance with one exemplary embodiment in FIG. 5, the interference compensation circuit 112 can be configured to tap off the digital version of the microphone signal at the output of the modulator 110 (or a block connected downstream of the output of the modulator), to derive therefrom the low-frequency signal interference (e.g. by estimation or filtering, for example by means of low-pass filter or bandpass filter), and to provide the interference compensation signal 114 with an inverted version (e.g. sign-inverted version) of the low-frequency signal interference or a further processed version thereof (e.g. an amplified or further filtered version of the low-frequency signal interference), such that the interference compensation signal is opposed to the low-frequency signal interference present at the input of the modulator 110 (or at a block connected upstream of the modulator 110).

By way of example, on the basis of the 1-bit (single-bit) output signal of a delta-sigma modulator 110, an estimation of the low-frequency interference components can be carried out and the latter can be converted into an analog signal which can be subtracted at the input of the analog-to-digital converter 110 (as modulator). One example of the estimation circuit is an integrating low-pass filter having a high DC gain, which filter integrates a positive or negative reference voltage depending on the digital output state. The band-limited analog output signal could be used e.g. for reducing (or even eliminating) DC offsets that can occur in microphones on account of particles in the MEMS sensor.

The exemplary embodiments described above provide an efficient compensation of low-frequency interference, whereby the overload behavior and the SNR loss (caused by the decrease in sensitivity in conventional approaches) can be reduced or even minimized.

A detailed exemplary embodiment of a MEMS microphone module is described below with reference to FIG. 6.

In detail, FIG. 6 shows a schematic block diagram of an exemplary MEMS microphone module 100 comprising a digital modulator 110, in accordance with one exemplary embodiment. In other words, FIG. 6 shows a schematic block diagram of an exemplary implementation of the suppression of low-frequency interference in a MEMS microphone module 100.

The starting point of the exemplary MEMS microphone module shown in FIG. 6 is the exemplary embodiment of the MEMS microphone module 100 as shown in FIG. 3, and so only differences and/or developments are described below.

The digital low-pass filter 108 can be for example a third-order digital low-pass filter and have for example a filter frequency (cut-off frequency) of 20 kHz.

As can be discerned in FIG. 6, the interference compensation circuit 112 can comprise a digital low-pass filter 122, which can be configured to filter the digital version of the microphone signal (which can be tapped off e.g. at the output of the digital low-pass filter 108), in order to obtain the low-frequency signal interference.

The digital low-pass filter 122 can be for example a first-order digital low-pass filter and have for example a filter frequency (cut-off frequency) of 3 Hz.

Optionally, the interference compensation circuit 112 can comprise a first sampling rate converter 124 connected upstream of the low-pass filter 122, and a second sampling rate converter 126 connected downstream of the low-pass filter 122. The first sampling rate converter 124 can be configured to reduce a sampling rate of the digital version of the microphone signal from a first sampling rate to a second sampling rate (e.g. by the factor eight), wherein the second sampling rate converter 126 can be configured to increase a sampling rate of the filtered digital version of the microphone signal from the second sampling rate to the first sampling rate (e.g. by the factor eight).

As can be discerned in FIG. 6, in exemplary embodiments, the output signal of the digital low-pass filter 108 can be used for the filtering of the low-frequency interference. As a result, the signal can be decimated considerably without further filtering. The low-pass filter 122 for estimating the low-frequency interference can be implemented at the low sampling rate (lower power loss and more efficient implementation). By means of a simple repeater, the output signal can be interpolated up to the high sampling rate and subtracted.

Simulation results of the exemplary MEMS microphone module 100 shown in FIG. 6 with activated and deactivated compensation of low-frequency signal interference are shown in FIG. 7.

In detail, FIG. 7 shows a diagram of a profile of the output signal of the digital modulator 110 with activated and deactivated compensation of signal interference plotted against frequency (FFT comparison (output signal of digital modulator 110) with/without interference suppression). In this case, the ordinate indicates the amplitude in dB, while the abscissa indicates the frequency in Hz.

In FIG. 7, a first curve 140 describes the output signal of the modulator 110 with deactivated low-frequency interference signal component compensation, while a second curve 142 describes the output signal of the modulator 110 with activated low-frequency interference signal component compensation.

In other words, FIG. 7 shows the results with (second curve 142) and without (first curve 140) interference suppression in the spectral range for the so-called “syringe test”. Without interference suppression, the prominent overdriving of the digital modulator is clearly evident in the spectrum (first curve 140).

As can be discerned in FIG. 7, exemplary embodiments lead to a significant signal reduction in the lower frequency range (including offset).

FIG. 8 shows a flow diagram of a method 200 for operating a MEMS microphone module, in accordance with one exemplary embodiment. The method 200 comprises a step 202 of applying an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

Further exemplary embodiments provide a MEMS microphone module, comprising a MEMS microphone, a modulator connected downstream of the MEMS microphone, and an interference compensation circuit configured to apply an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

In exemplary embodiments, the low-frequency signal interference can result from a pressure pulse acting on a membrane of the MEMS microphone.

In exemplary embodiments, the low-frequency signal interference can have a frequency of 10 Hz or less.

In exemplary embodiments, the interference compensation circuit can be directly connected to the input of the modulator.

In exemplary embodiments, the interference compensation circuit can be connected to the input of the modulator via a block connected upstream of the input of the modulator.

In exemplary embodiments, the interference compensation circuit can be configured to derive the low-frequency signal interference from a digital version of a microphone signal provided by the MEMS microphone or a further processed version thereof, wherein the interference compensation circuit can be configured to provide the interference compensation signal with an inverted version (e.g. sign-inverted version) of the low-frequency signal interference or a further processed version thereof (e.g. an amplified or further filtered version of the low-frequency signal interference), such that the interference compensation signal is opposed to the low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

In exemplary embodiments, the interference compensation circuit can be configured to estimate the low-frequency signal interference.

In exemplary embodiments, the interference compensation circuit can be configured to filter the digital version of the microphone signal in order to obtain the low-frequency signal interference.

In exemplary embodiments, the interference compensation circuit can comprise a low-pass filter or bandpass filter.

In exemplary embodiments, the interference compensation circuit can comprise a first sampling rate converter, which can be connected upstream of the low-pass filter or bandpass filter.

In exemplary embodiments, the interference compensation circuit can comprise a second sampling rate converter, which can be connected downstream of the low-pass filter or bandpass filter.

In exemplary embodiments, the first sampling rate converter can be configured to reduce a sampling rate of the digital version of the microphone signal from a first sampling rate to a second sampling rate.

In exemplary embodiments, the second sampling rate converter can be configured to increase a sampling rate of the filtered digital version of the microphone signal from the second sampling rate to the first sampling rate.

In exemplary embodiments, the modulator can be a digital modulator.

In exemplary embodiments, the interference compensation circuit can be configured to tap off the digital version of the microphone signal at the input of the modulator or a block connected upstream of the input of the modulator.

In exemplary embodiments, the MEMS microphone module can comprise an equalizer, which can be connected upstream of the modulator, wherein the interference compensation circuit can be configured to apply the interference compensation signal to the input of the modulator or the input of the equalizer. In exemplary embodiments, the interference compensation circuit can be configured to tap off the digital version of the microphone signal at the input of the equalizer or a block connected upstream of the input of the equalizer.

In exemplary embodiments, the MEMS microphone module can comprise a digital low-pass filter connected upstream of the equalizer. In exemplary embodiments, the interference compensation circuit can be configured to tap off the digital version of the microphone signal at the input or output of the digital low-pass filter.

In exemplary embodiments, the MEMS microphone module can comprise an analog-to-digital converter connected downstream of the MEMS microphone.

In exemplary embodiments, the modulator can be an analog-to-digital converter.

In exemplary embodiments, the interference compensation circuit can be configured to tap off the digital version of the microphone signal at the output of the modulator or a block connected downstream of the output of the modulator.

In exemplary embodiments, the modulator can be a 1-bit modulator.

Further exemplary embodiments provide a MEMS microphone module, comprising a MEMS microphone, a modulator connected downstream of the MEMS microphone, and an interference compensation circuit configured to apply an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present in a signal chain between the MEMS microphone and modulator.

Further exemplary embodiments provide a method for operating a MEMS microphone module, wherein the MEMS microphone module comprises a MEMS microphone and a modulator connected downstream of the MEMS microphone. The method comprises a step of applying an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

Further exemplary embodiments provide a device for operating a MEMS microphone module, wherein the MEMS microphone module comprises a MEMS microphone and a modulator connected downstream of the MEMS microphone. The device comprises means for applying an interference compensation signal to an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator.

Although some aspects have been described in association with a device, it goes without saying that these aspects also constitute a description of the corresponding method, and so a block or a component of a device should also be understood as a corresponding method step or as a feature of a method step. Analogously thereto, aspects that have been described in association with or as a method step also constitute a description of a corresponding block or detail or feature of a corresponding device. Some or all of the method steps can be carried out by a hardware apparatus (or using a hardware apparatus), such as, for example, a microprocessor, a programmable computer or an electronic circuit. In some exemplary embodiments, some or a plurality of the most important method steps can be carried out by such an apparatus.

Depending on specific implementation requirements, exemplary embodiments of the invention can be implemented in hardware or in software. The implementation can be effected using a digital storage medium, for example a floppy disk, a DVD, a Blu-ray disk, a CD, a ROM, a PROM, an EPROM, an EEPROM or a FLASH memory, a hard disk or some other magnetic or optical storage unit on which are stored electronically readable control signals which can interact or interact with a programmable computer system in such a way that the respective method is carried out. Therefore, the digital storage medium can be computer-readable.

Some exemplary embodiments according to the invention thus comprise a data carrier having electronically readable control signals which are able to interact with a programmable computer system in such a way that one of the methods described herein is carried out.

Generally, exemplary embodiments of the present invention can be implemented as a computer program product comprising a program code, wherein the program code is effective for carrying out one of the methods when the computer program product runs on a computer.

The program code can for example also be stored on a machine-readable carrier.

Other exemplary embodiments comprise the computer program for carrying out one of the methods described herein, wherein the computer program is stored on a machine-readable carrier.

In other words, one exemplary embodiment of the method according to the invention is thus a computer program comprising a program code for carrying out one of the methods described herein when the computer program runs on a computer.

A further exemplary embodiment of the methods according to the invention is thus a data carrier (or a digital storage medium or a computer-readable medium) on which the computer program for carrying out one of the methods described herein is recorded. The data carrier, the digital storage medium or the computer-readable medium are typically tangible and/or non-transitory or non-temporary.

A further exemplary embodiment of the method according to the invention is thus a data stream or a sequence of signals which constitute(s) the computer program for carrying out one of the methods described herein. The data stream or the sequence of signals can be configured for example to the effect of being transferred via a data communication connection, for example via the Internet.

A further exemplary embodiment comprises a processing device, for example a computer or a programmable logic component, which is configured or adapted to the effect of carrying out one of the methods described herein.

A further exemplary embodiment comprises a computer on which the computer program for carrying out one of the methods described herein is installed.

A further exemplary embodiment according to the invention comprises a device or a system designed to transmit a computer program for carrying out at least one of the methods described herein to a receiver. The transmission can be effected electronically or optically, for example. The receiver can be, for example, a computer, a mobile device, a memory device or a similar device. The device or the system can comprise for example a file server for transmitting the computer program to the receiver.

In some exemplary embodiments, a programmable logic component (for example a field programmable gate array, an FPGA) can be used to carry out some or all functionalities of the methods described herein. In some exemplary embodiments, a field programmable gate array can interact with a microprocessor in order to carry out one of the methods described herein. Generally, in some exemplary embodiments, the methods are carried out on the part of an arbitrary hardware device. The latter can be universally usable hardware such as a computer processor (CPU) or hardware specific to the method, such as an ASIC, for example.

The devices described herein can be implemented for example using a hardware apparatus, or using a computer, or using a combination of a hardware apparatus and a computer.

The devices described herein, or any components of the devices described herein, can be implemented at least partly in hardware and/or in software (computer program).

The methods described herein can be implemented for example using a hardware apparatus, or using a computer, or using a combination of a hardware apparatus and a computer.

The methods described herein, or any components of the methods described herein, can be implemented at least partly by hardware and/or by software.

Although specific embodiments have been illustrated and described here, it is obvious to a person of average skill in the art that a multiplicity of alternative and/or equivalent implementations can replace the specific embodiments shown and described, without departing from the scope of the present invention. This application is intended to cover all adaptations or variations of the specific embodiments discussed herein. Therefore, the intention is for this invention to be restricted only by the claims and the equivalents thereof. 

What is claimed is:
 1. A MEMS (micro-electro-mechanical systems) microphone module, comprising: a MEMS microphone; a modulator connected downstream of the MEMS microphone; and an interference compensation circuit configured to subtract an interference compensation signal from an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator, wherein: the interference compensation circuit is configured to derive the low-frequency signal interference from a digital version of a microphone signal provided by the MEMS microphone or a further processed version thereof, the interference compensation circuit is configured to tap off the digital version of the microphone signal at the input of the modulator or the block connected upstream of the input of the modulator, and the interference compensation circuit comprises a low-pass filter or a bandpass filter, a first sampling rate converter connected upstream of the low-pass filter or the bandpass filter, and a second sampling rate converter connected downstream of the low-pass filter or the bandpass filter.
 2. The MEMS microphone module as claimed in claim 1, wherein the low-frequency signal interference has an amplitude that is greater than an allowed input amplitude range of the modulator.
 3. The MEMS microphone module as claimed in claim 1, wherein the low-frequency signal interference has a frequency of 10 Hz or less.
 4. The MEMS microphone module as claimed in claim 1, wherein the interference compensation circuit is directly connected to the input of the modulator, or wherein the interference compensation circuit is connected to the input of the modulator via the block connected upstream of the input of the modulator.
 5. The MEMS microphone module as claimed in claim 1, wherein the interference compensation circuit is configured to estimate the low-frequency signal interference.
 6. The MEMS microphone module as claimed in claim 1, wherein the interference compensation circuit is configured to filter the digital version of the microphone signal in order to obtain the low-frequency signal interference.
 7. The MEMS microphone module as claimed in claim 6, wherein the first sampling rate converter is configured to reduce a sampling rate of the digital version of the microphone signal from a first sampling rate to a second sampling rate, and wherein the second sampling rate converter is configured to increase a sampling rate of the filtered digital version of the microphone signal from the second sampling rate to the first sampling rate.
 8. The MEMS microphone module as claimed in claim 1, wherein the modulator comprises a digital modulator.
 9. The MEMS microphone module as claimed in claim 8, wherein the MEMS microphone module comprises an equalizer connected upstream of the modulator, wherein the interference compensation circuit is configured to apply the interference compensation signal to the input of the modulator or the input of the equalizer, and wherein the interference compensation circuit is configured to tap off the digital version of the microphone signal at the input of the equalizer or the block connected upstream of the input of the equalizer.
 10. The MEMS microphone module as claimed in claim 9, wherein the MEMS microphone module comprises a digital low-pass filter connected upstream of the equalizer, and wherein the interference compensation circuit is configured to tap off the digital version of the microphone signal at the input or output of the digital low-pass filter.
 11. The MEMS microphone module as claimed in claim 1, wherein the MEMS microphone module comprises an analog-to-digital converter connected downstream of the MEMS microphone.
 12. The MEMS microphone module as claimed in claim 1, wherein the modulator comprises an analog-to-digital converter.
 13. The MEMS microphone module as claimed in claim 1, wherein the modulator comprises a 1-bit modulator.
 14. The MEMS microphone module as claimed in claim 1, wherein the interference compensation circuit is configured to estimate the low-frequency signal interference using the low-pass filter, and to subtract an output of the low-pass filter from the input of the modulator.
 15. The MEMS microphone module as claimed in claim 14, wherein the low-pass filter is a digital low-pass filter.
 16. A MEMS (micro-electro-mechanical systems) microphone module, comprising: a MEMS microphone; a modulator connected downstream of the MEMS microphone; and an interference compensation circuit configured to subtract an interference compensation signal from an input of the modulator, said interference compensation signal being opposed to a low-frequency signal interference present in a signal chain between the MEMS microphone and modulator, wherein the interference compensation circuit is configured to derive the low-frequency signal interference from a digital version of a microphone signal provided by the MEMS microphone or a further processed version thereof, the interference compensation circuit is configured to tap off the digital version of the microphone signal at the input of the modulator or a block connected upstream of the input of the modulator, and the interference compensation circuit comprises a low-pass filter or a bandpass filter, a first sampling rate converter connected upstream of the low-pass filter or the bandpass filter, and a second sampling rate converter connected downstream of the low-pass filter or the bandpass filter.
 17. A method for operating a MEMS (micro-electro-mechanical systems) microphone module, wherein the MEMS microphone module comprises a MEMS microphone and a modulator connected downstream of the MEMS microphone, wherein the method comprises: tapping off a digital version of a microphone signal at an input to the modulator or a block connected upstream of the input of the modulator; deriving a low-frequency signal interference from the digital version of the microphone signal provided by the MEMS microphone or a further processed version thereof, wherein deriving the low-frequency signal interference comprises performing a first sampling rate conversion on the digital version of the microphone signal provided by the MEMS microphone or the further processed version thereof to form a first sample rate converted signal, filtering the first sample rate converted signal using a low-pass filter or a bandpass filter to form a filtered signal, and performing a second sampling rate conversion on the filtered signal to form an interference compensation signal; and subtracting the interference compensation signal from the input of the modulator, said interference compensation signal being opposed to the low-frequency signal interference present at the input of the modulator or the block connected upstream of the input of the modulator.
 18. A non-transitory computer readable medium having stored thereon instructions that, when executed by a processor, perform the method as claimed in claim
 17. 19. A device for operating a MEMS (micro-electro-mechanical systems) microphone module, wherein the MEMS microphone module comprises a MEMS microphone and a modulator connected downstream of the MEMS microphone, wherein the device comprises: an interference compensation circuit configured to: perform a first sampling rate conversion on a digital version of a microphone signal provided by the MEMS microphone or a further processed version thereof to form a first sample rate converted signal, filter the first sample rate converted signal using a low-pass filter or a bandpass filter to form a filtered signal, perform a second sampling rate conversion on the filtered signal to form an interference compensation signal, and subtract the interference compensation signal from an input of the modulator, the interference compensation signal being opposed to a low-frequency signal interference present at the input of the modulator or a block connected upstream of the input of the modulator. 